Transmission-Type Plano-Concave Lens Using in the Range of Extreme Ultraviolet Wavelength

doi:10.1109/LPT.2014.2320551

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	Transmission-Type Plano-Concave Lens Using in the Range of Extreme Ultraviolet Wavelength
	Li, Yan1 ; Xu, Xiangyan2 ; Li, Xiao-Li 1
作者部门	条纹相机工程中心
	2014-06-15
发表期刊	IEEE PHOTONICS TECHNOLOGY LETTERS
ISSN	1041-1135
卷号	26 期号:12 页码:1239-1242
产权排序	2
摘要	A one-dimensional photonic crystal consisting of the fourth-order Fibonacci multilayer films has been studied by the finite-difference time-domain method and transfer matrix method. The refractive indices for two layers of the Fibonacci multilayer films are similar with that of manganese and silicon in the extreme ultraviolet (EUV) band. The simulation result shows that there is an isotropic negative refractive index for the one-dimensional photonic crystal. Based on the character above, a kind of transmission-type plano-concave lens, which can be used in the EUV band (or soft X-ray), is designed. The distributions of the electromagnetic field for the lens and transimissivity of the Fibonacci multilayers films have also been calculated. The result demonstrates that the lens can focus the incoming EUV radiation, and its transmissivity is bigger than 5%-9% compared with that of the Fibonacci multilayers films, having the same structure with the lens. This letter has potential applications in the tansmission-type lens for EUV lithography.
文章类型	Article
关键词	Extreme Ultraviolet Band Fibonacci Multi-layer Films Photonic Crystal Lens Negative Refractive Index
WOS标题词	Science & Technology ; Technology ; Physical Sciences
DOI	10.1109/LPT.2014.2320551
收录类别	SCI ; EI
关键词[WOS]	PHOTONIC CRYSTALS
语种	英语
WOS研究方向	Engineering ; Optics ; Physics
WOS类目	Engineering, Electrical & Electronic ; Optics ; Physics, Applied
WOS记录号	WOS:000337149300005
引用统计
文献类型	期刊论文
条目标识符	http://ir.opt.ac.cn/handle/181661/22475
专题	条纹相机工程中心
作者单位	1.Xian Shiyou Univ, Sch Sci, Xian 710065, Peoples R China 2.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 710119, Peoples R China
推荐引用方式 GB/T 7714	Li, Yan,Xu, Xiangyan,Li, Xiao-Li. Transmission-Type Plano-Concave Lens Using in the Range of Extreme Ultraviolet Wavelength[J]. IEEE PHOTONICS TECHNOLOGY LETTERS,2014,26(12):1239-1242.
APA	Li, Yan,Xu, Xiangyan,&Li, Xiao-Li.(2014).Transmission-Type Plano-Concave Lens Using in the Range of Extreme Ultraviolet Wavelength.IEEE PHOTONICS TECHNOLOGY LETTERS,26(12),1239-1242.
MLA	Li, Yan,et al."Transmission-Type Plano-Concave Lens Using in the Range of Extreme Ultraviolet Wavelength".IEEE PHOTONICS TECHNOLOGY LETTERS 26.12(2014):1239-1242.

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