| Optical aligning and measuring methods for large aperture optical system | |
| Zhang Xue-min; Wei Ru-yi; Duan Jia-you; Yang Jian-feng; Li Hua; Hou Xiaohua | |
| 2012 | |
| 会议名称 | 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies |
| 会议录名称 | 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies |
| 卷号 | 8416 |
| 页码 | 84162F |
| 出版地 | P.O. Box 10, Bellingham, WA 98227-0010, United States |
| 出版者 | SPIE |
| 产权排序 | 1 |
| 摘要 | How to implement high accuracy measurement of large-aperture coaxial optical system is crucial to the optical alignment and optical property evaluation. The methods of image quality measurement including interferometer-collimating testing, wave front testing by using Hartmann, image processing and analysis of out-of-focus image were introduced. Both the advantages and disadvantages of the three methods were compared, which showed that the alignment method based on interferometer-collimating testing is the one with the highest accuracy. The method of computer-aided alignment (CAA) based on interferometer-collimating was discussed in detail. By using a ZYGO interferometer, interferograms with different field of views and a series of Zernike coefficients were obtained to express the disalignment of the system, and then these incorrect parameters were calculated by CAA algorithms. An alignment experiment of coaxial three-mirror system with 4m focal length and 500mm aperture was carried out. The RMS value of the system is lower than 0.07λ after iterations, which is close to the optical diffraction limit, proving the effectiveness of CAA method in alignment guidance. |
| 作者部门 | 系统工程部 |
| 收录类别 | EI |
| ISBN号 | 9780819490988 |
| 语种 | 英语 |
| ISSN号 | 277786X |
| 文献类型 | 会议论文 |
| 条目标识符 | http://ir.opt.ac.cn/handle/181661/20865 |
| 专题 | 装校技术研究中心 |
| 推荐引用方式 GB/T 7714 | Zhang Xue-min,Wei Ru-yi,Duan Jia-you,et al. Optical aligning and measuring methods for large aperture optical system[C]. P.O. Box 10, Bellingham, WA 98227-0010, United States:SPIE,2012:84162F. |
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| 文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
| Optical aligning and（321KB） | 限制开放 | CC BY-NC-SA | 请求全文 | |||
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