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Study on the precision measurement of high-flux large aperture sampling grating
YUAN Hao-yu; CHEN Yong-quan; PENG Zhi-tao; DUAN Ya-xuan; WU Jian-hong; FU Shao-jun
2012
会议名称6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
会议录名称6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
卷号8417
页码84170W
出版地P.O. Box 10, Bellingham, WA 98227-0010, United States
出版者SPIE
产权排序2
摘要This paper describes an effective method for the measurements of large aperture sampling grating, the sampling efficiency the sampling focal length and the sampling angle. By using a 351nm collimation laser source to scan the full aperture of the sampling grating in every subregion, the diffraction power of "0" order and "+1" order can be obtained synchronously by two standard integrating balls, And then by calculating the sampling efficiency of this subregion and splicing the acquisition data, we can get the averaged grating sampling efficiency in the full aperture.Based on this method, we can effectively eliminate the effect of the output instability of laser source, decrease the uncertainty of test results. According to the fabrication principle of the sampling grating, measurements for the sampling focal length and the sampling angle can be performed. Test rersults indicate that this method can be used to measure large aperture sampling gratings.
作者部门检测技术研究中心
收录类别CPCI(ISTP) ; EI
ISBN号9780819490995
语种英语
ISSN号0277786X
文献类型会议论文
条目标识符http://ir.opt.ac.cn/handle/181661/20862
专题检测技术研究中心
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GB/T 7714
YUAN Hao-yu,CHEN Yong-quan,PENG Zhi-tao,et al. Study on the precision measurement of high-flux large aperture sampling grating[C]. P.O. Box 10, Bellingham, WA 98227-0010, United States:SPIE,2012:84170W.
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