In order to measure the waveaberrationofopticallenswith small field ofview rapidly and precisely, a new waveaberrationmeasuringsystembasedon both auto-collimation principle and Fizeau spherical laser interferometer measurementprinciple is described. The waveaberrationmeasurementprinciple by Fizeau spherical laser interferometer is introduced. The assembling and measuring methods of this new auto-collimation-basedwaveaberrationsystem are discussed and analyzed in detail. By using the characteristic of auto-collimation optics, the in-terferometer's axis, the opticallens's optical axis and the high-precision reflector's axis are precisely determined, and the fast assembly of the opticalsystem is implemented too. Analyses reveal that this system can be an effective solution to the optical axis deviation problem in measuring the waveaberrationofopticallenswith small-field ofview, and implementing the waveaberration test ofopticallens rapidly and accurately.
修改评论