An improved, real-time method for removing the cyclic error of a homodyne interferometer

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	An improved, real-time method for removing the cyclic error of a homodyne interferometer
	ZhaoSuwen; WenDesheng; ZhuShaolan; LiangShitong; Zhao Suwen
	2011
会议名称	International Symposium on Photoelectronic Detection and Imaging 2012: Laser Sensing and Imaging; and Biological and Medical Applications of Photonics Sensing and Imaging
会议录名称	Proceedings of SPIE - The International Society for Optical Engineering
页码	81924G
会议日期	May 24, 2011 - May 26, 2017
会议地点	Beijing, China
出版地	P.O. Box 10, Bellingham, WA 98227-0021, United States
会议主办者	Chinese Society of Astronautics (CAS)
出版者	SPIE
产权排序	1
摘要	The nonlinear error of a homodyne interferometer is presented: the amplitudes, the phase and the offsets. An improved compensation method is introduced since the conventional Heydeman modal' calculation is very time-consuming. First, the "zero drift" problem is solved with the polarization phase-shifting technology; second, a fast algorithm based on the Heydeman method is introduced to calculate the errors; and third, electronic circuit is used to remove the nonlinear errors timely. The test result shows that the nonlinearity of the homodyne interferometer could be reduced to subnanometer over the measuring range of 20cm, and the accuracy can be improved more than tenfold by the dynamic compensation method.
关键词	Single Frequency Laser Interferometer Error Correction Real-time Compensation Lissajous Figure
作者部门	瞬态光学国家重点实验室
收录类别	EI ; CPCI
语种	英语
ISSN号	0277-786X
文献类型	会议论文
条目标识符	http://ir.opt.ac.cn/handle/181661/20168
专题	瞬态光学研究室
通讯作者	Zhao Suwen
推荐引用方式 GB/T 7714	ZhaoSuwen,WenDesheng,ZhuShaolan,et al. An improved, real-time method for removing the cyclic error of a homodyne interferometer[C]. P.O. Box 10, Bellingham, WA 98227-0021, United States:SPIE,2011:81924G.

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