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Transfer process of LT-GaAs epitaxial films for on-chip terahertz antenna integrated device 期刊论文
JOURNAL OF INFRARED AND MILLIMETER WAVES, 2017, 卷号: 36, 期号: 2, 页码: 220-+
Authors:  Guo Chun-Yan;  Xu Jian-Xing;  Peng Hong-Ling;  Ni Hai-Qiao;  Wang Tao;  Tian Jin-Shou;  Niu Zhi-Chuan;  Wu Zhao-Xin;  Zuo Jian;  Zhang Cun-Lin;  Niu, ZC (reprint author), Chinese Acad Sci, Inst Semicond, State Key Lab Superlatt, Beijing 100083, Peoples R China.
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On-chip Thz Antenna Integrated Device  Lt-gaas  Epitaxial Layer Transfer  Wet Chemical Etching