Laser having equilateral triangular optical resonators of orienting output

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	Laser having equilateral triangular optical resonators of orienting output
其他题名	Laser having equilateral triangular optical resonators of orienting output
	HUANG, YONGZHEN
	2004-07-13
专利权人	INSTITUTE OF SEMICONDUCTORS, CHINESE ACADEMY OF SCIENCES
公开日期	2004-07-13
授权国家	美国
专利类型	授权发明
摘要	A semiconductor laser with an equilateral triangle micro optical resonator has an output waveguide connected to the resonator for realizing directional emission, and the laser wafer structure is the slab waveguide constituted by lower cladding layer, active region and the upper cladding layer. The outer region of the equilateral triangle is etched to the lower cladding layer or substrate, while the unetched equilateral triangle region is used as the resonator, and the triangular sides serve as the reflecting mirrors. On one of the vertices or the sides of the triangle resonator connected or coupled an output waveguide can form an edge emission semiconductor laser and array having directive light emission. If the output waveguide is intersected with an incline, enabling the output light to deflect 90° then surface emission output can be acquired, thereby a surface emission semiconductor laser and array is produced, and a multi-wavelength semiconductor laser or array can be made by the equilateral triangle micro optical resonators of various dimensions.
其他摘要	具有等边三角形微光学谐振器的半导体激光器具有连接到谐振器的输出波导，用于实现定向发射，激光晶片结构是由下包层，有源区和上包层构成的平板波导。等边三角形的外部区域被蚀刻到下包层或基板，而未蚀刻的等边三角形区域被用作谐振器，并且三角形边缘用作反射镜。在连接或耦合的三角形谐振器的顶点或侧面之一上，输出波导可以形成边缘发射半导体激光器和具有定向光发射的阵列。如果输出波导与斜面相交，使输出光偏转90°，则可以获得表面发射输出，从而产生表面发射半导体激光器和阵列，并且可以通过以下方式制造多波长半导体激光器或阵列：各种尺寸的等边三角形微光学谐振器。
申请日期	2001-01-10
专利号	US6763052
专利状态	授权
申请号	US10/257655
公开（公告）号	US6763052
IPC 分类号	H01S5/18 \| H01S5/00 \| H01S3/08 \| H01S3/081 \| H01S3/083
专利代理人	-
代理机构	MADSON & METCALF
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/47223
专题	半导体激光器专利数据库
作者单位	INSTITUTE OF SEMICONDUCTORS, CHINESE ACADEMY OF SCIENCES
推荐引用方式 GB/T 7714	HUANG, YONGZHEN. Laser having equilateral triangular optical resonators of orienting output. US6763052[P]. 2004-07-13.

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