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An analytical model to predict the sizes of modified layer in glass with femtosecond Bessel beam
Liao, Kai1,2,3; Wang, Wenjun1,2,3; Mei, Xuesong1,2,3; Cui, Jianlei1,2,3; Li, Ming4; Li, Xun4
作者部门瞬态光学研究室
2019-05
发表期刊Optik
ISSN00304026
卷号185页码:232-241
产权排序4
摘要

Femtosecond Bessel beam is advantageous in high-quality glass cutting because of its resistance to diffraction. However, the sizes of the modified layer in the glass ablated by Bessel beam can be affected by many factors. In this study, an analytical model to predict the sizes(the depth and the maximum diameter) of modified layer in glass with femtosecond Bessel beam based on an axicon through an orthogonal experiment L16(44) was conducted. The coefficient values of four factors are obtained through the Matlab multiple linear regression function based on the experimental data. Simultaneously, the significance of the regression equation was tested by using the F-value test and the verification test. It found that the experimental results are consistent with the theoretical results. The combined processing parameters with the largest aspect ratio are determined through the range analysis and the influence of the various factors on the sizes was obtained. Finally, an application of thin glass cutting by the internal modification and breaking process is demonstrated. The glass is well cut with the chipping on the breaking edge © 2019 Elsevier GmbH

关键词Femtosecond bessel beam Sizes of modified layer Analytical model Regression analysis Range analysis
DOI10.1016/j.ijleo.2019.03.071
收录类别SCI ; EI
语种英语
WOS记录号WOS:000476692600032
出版者Elsevier GmbH
EI入藏号20191406722593
引用统计
被引频次:10[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.opt.ac.cn/handle/181661/31359
专题瞬态光学研究室
通讯作者Wang, Wenjun
作者单位1.State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, 99 Yanxiang Road, Xi'an; Shaanxi; 710054, China;
2.Shaanxi Key Laboratory of Intelligent Robots, Xi'an Jiaotong University, 28 West Xianning Road, Xi'an; Shaanxi; 710049, China;
3.School of Mechanical Engineering, Xi'an Jiaotong University, 28 West Xianning Road, Xi'an; Shaanxi; 710049, China;
4.State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics of CAS, Xi'an; 710119, China
推荐引用方式
GB/T 7714
Liao, Kai,Wang, Wenjun,Mei, Xuesong,et al. An analytical model to predict the sizes of modified layer in glass with femtosecond Bessel beam[J]. Optik,2019,185:232-241.
APA Liao, Kai,Wang, Wenjun,Mei, Xuesong,Cui, Jianlei,Li, Ming,&Li, Xun.(2019).An analytical model to predict the sizes of modified layer in glass with femtosecond Bessel beam.Optik,185,232-241.
MLA Liao, Kai,et al."An analytical model to predict the sizes of modified layer in glass with femtosecond Bessel beam".Optik 185(2019):232-241.
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