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An analytical model to predict the sizes of modified layer in glass with femtosecond Bessel beam
Liao, Kai1,2,3; Wang, Wenjun1,2,3; Mei, Xuesong1,2,3; Cui, Jianlei1,2,3; Li, Ming4; Li, Xun4
Department瞬态光学技术国家重点实验室
2019-05
Source PublicationOptik
ISSN00304026
Volume185Pages:232-241
Contribution Rank4
Abstract

Femtosecond Bessel beam is advantageous in high-quality glass cutting because of its resistance to diffraction. However, the sizes of the modified layer in the glass ablated by Bessel beam can be affected by many factors. In this study, an analytical model to predict the sizes(the depth and the maximum diameter) of modified layer in glass with femtosecond Bessel beam based on an axicon through an orthogonal experiment L16(44) was conducted. The coefficient values of four factors are obtained through the Matlab multiple linear regression function based on the experimental data. Simultaneously, the significance of the regression equation was tested by using the F-value test and the verification test. It found that the experimental results are consistent with the theoretical results. The combined processing parameters with the largest aspect ratio are determined through the range analysis and the influence of the various factors on the sizes was obtained. Finally, an application of thin glass cutting by the internal modification and breaking process is demonstrated. The glass is well cut with the chipping on the breaking edge © 2019 Elsevier GmbH

KeywordFemtosecond bessel beam Sizes of modified layer Analytical model Regression analysis Range analysis
DOI10.1016/j.ijleo.2019.03.071
Indexed BySCI ; EI
Language英语
WOS IDWOS:000476692600032
PublisherElsevier GmbH
EI Accession Number20191406722593
Citation statistics
Document Type期刊论文
Identifierhttp://ir.opt.ac.cn/handle/181661/31359
Collection瞬态光学技术国家重点实验室
Corresponding AuthorWang, Wenjun
Affiliation1.State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, 99 Yanxiang Road, Xi'an; Shaanxi; 710054, China;
2.Shaanxi Key Laboratory of Intelligent Robots, Xi'an Jiaotong University, 28 West Xianning Road, Xi'an; Shaanxi; 710049, China;
3.School of Mechanical Engineering, Xi'an Jiaotong University, 28 West Xianning Road, Xi'an; Shaanxi; 710049, China;
4.State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics of CAS, Xi'an; 710119, China
Recommended Citation
GB/T 7714
Liao, Kai,Wang, Wenjun,Mei, Xuesong,et al. An analytical model to predict the sizes of modified layer in glass with femtosecond Bessel beam[J]. Optik,2019,185:232-241.
APA Liao, Kai,Wang, Wenjun,Mei, Xuesong,Cui, Jianlei,Li, Ming,&Li, Xun.(2019).An analytical model to predict the sizes of modified layer in glass with femtosecond Bessel beam.Optik,185,232-241.
MLA Liao, Kai,et al."An analytical model to predict the sizes of modified layer in glass with femtosecond Bessel beam".Optik 185(2019):232-241.
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