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Manufacturing and testing of surface modified silicon carbide aspheric mirror
Ding, Jiao Teng1,2; Fan, Xue Wu1; Pang, Zhi Hai1; Feng, Liang Jie1; Chen, Qin Fang1; Ma, Zhen1
2019
Conference Name9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, AOMATT 2018
Source Publication9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes
Volume10837
Conference Date2018-06-26
Conference PlaceChengdu, China
PublisherSPIE
Contribution Rank1
AbstractThe manufacturing and testing of a surface modified silicon carbide mirror with a bowl-shaped structure was introduced. The entire process flow includes pre-modification silicon carbide substrate processing, silicon carbide substrate surface modification, and silicon modified layer processing. Firstly, before the modification, the conventional processing method of silicon carbide was used, and the effect of the support form on the figure was eliminated by multiple direction rotation testing.At the same time, the self-aligned compensation cross-test was completed and the accuracy of the aspherical surface coefficient was verified. In addition, the polishing process of the silicon modified layer material was studied, and the optimum process parameters suitable for polishing the silicon modified layer material were found out. Based on the above experiments, the modified optical processing adopts a combination of two kinds of polishing technology: flexible chemical mechanical polishing (FCMP)and ion beam figuring (IBF).The surface roughness and surface finish of silicon modified layer are improved by flexible chemical mechanical polishing technology. The high figure accuracy of silicon modified layer is achieved finally by ion beam figuring technology. Finally, the final result of the mirror after IBF is:the RMS values of the figure and roughness in the Φ450 mm aperture is 0.01λ (λ=632.8 nm) and 0.52 nm. The mirror's processing results fully meet the design specifications. © 2019 SPIE.
Department空间光学应用研究室
DOI10.1117/12.2504853
Indexed ByEI
ISBN9781510623163
Language英语
ISSN0277786X;1996756X
EI Accession Number20190506432471
Citation statistics
Document Type会议论文
Identifierhttp://ir.opt.ac.cn/handle/181661/31235
Collection空间光学应用研究室
Affiliation1.Xi'an Institute of Optics and Precision Mechanics of CAS, Shannxi Xi'an; 710119, China;
2.University of Chinese Academy of Sciences, Beijing; 100049, China
Recommended Citation
GB/T 7714
Ding, Jiao Teng,Fan, Xue Wu,Pang, Zhi Hai,et al. Manufacturing and testing of surface modified silicon carbide aspheric mirror[C]:SPIE,2019.
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