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Broadband antireflection coating for the near-infrared InAs/GaSb Type-II superlattices photodetectors by lift-off process
Jia, Qing-Xuan1,2; Guo, Chun-Yan3,4; Sun, Yao-Yao1,2; Yang, Cheng-Ao1,2; Lv, Yue-Xi1,2; Jiang, Zhi1,2; Zheng, Da-Nong1,2; Han, Xi1,2; Jiang, Dong-Wei1,2; Wang, Guo-Wei1,2; Niu, Zhi-Chuan1,2
2018
Conference NameInfrared, Millimeter-Wave, and Terahertz Technologies V 2018
Source PublicationInfrared, Millimeter-Wave, and Terahertz Technologies V
Volume10826
Conference Date2018-10-12
Conference PlaceBeijing, China
PublisherSPIE
Contribution Rank3
AbstractNear-infrared InAs/GaSb Type-II superlattices is widely used in biomimetics, sensing, color-imaging technology and other applications. An antireflection coating(AR coating) can help it perform better, making the infrared photodetector a higher responstivity and also a higher quantum efficiency. We produce a broadband AR coating by plasma-enhanced chemical vapor deposition(PECVD) then using the lift-off technology making no damage without any change in the usual Infrared detector process flow, a 260 nm SiO2 AR coating is transform onto the surface of the infrared photodetector. After using the AR coating, the antireflection can provide up to 40% light gain, while the average reflectivity of the surface of InAs/GaSb type-II superlattice is decreased from 33% to 14%. The responsitivity is increased obviously. © 2018 SPIE.
Department精密物理量测量实验室
DOI10.1117/12.2509181
Indexed ByEI
ISBN9781510622500
Language英语
ISSN0277786X;1996764X
EI Accession Number20185106261396
Citation statistics
Document Type会议论文
Identifierhttp://ir.opt.ac.cn/handle/181661/31122
Collection精密物理量测量实验室
Corresponding AuthorNiu, Zhi-Chuan
Affiliation1.State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing; 100083, China;
2.College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing; 100049, China;
3.Key Laboratory of Ultra-fast Photoelectric Diagnostics Technology of Chinese Academy of Science, Xi'An Institute of Optics and Precision Mechanics, Xi'an; 710119, China;
4.Xi'An Jiaotong University, Xi'an; 710049, China
Recommended Citation
GB/T 7714
Jia, Qing-Xuan,Guo, Chun-Yan,Sun, Yao-Yao,et al. Broadband antireflection coating for the near-infrared InAs/GaSb Type-II superlattices photodetectors by lift-off process[C]:SPIE,2018.
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