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取样劈板的取样率及取样均匀性干涉测量系统及方法
Alternative Title取样劈板的取样率及取样均匀性干涉测量系统及方法
达争尚; 高立民; 陈永权; 李红光
2018-12-21
Rights Holder中国科学院西安光学精密机械研究所
Date Available2018-09-18
Country中国
Subtype发明专利
Contribution Rank1
Abstract本发明属于取样劈板的取样率及取样均匀性干涉测量系统及方法,系统包括沿光路依次设置的缩束望远镜及自准反射镜;待测取样劈板位于缩束望远镜与自准反射镜之间;缩束望远镜输出平行激光,投射至待测取样劈板的取样反射面取样,部分激光被待测取样劈板的取样反射面反射至缩束望远镜;另一部分激光透过待测取样劈板入射至自准反射镜,经自准反射镜反射后透过待测取样劈板进入缩束望远镜。解决了传统测量方法对于小份额取样率不易实现高的测量精度的问题。
Claim-
Subject AreaG01m11/02
MOST Discipline CatalogueG01
Copyright Date2018-12-21
DOIG01M11
Application Date2018-03-26
Patent NumberCN201810253356.4
Language中文
Status申请中
Application NumberCN201810253356.4
PCT Attributes
Open (Notice) NumberCN108548660A
IPC Classification NumberG01M11/02
Patent Agent汪海艳
Agency西安智邦专利商标代理有限公司
Citation statistics
Document Type专利
Identifierhttp://ir.opt.ac.cn/handle/181661/31010
Collection其它单位_其它部门
Affiliation中国科学院西安光学精密机械研究所
First Author Affilication中国科学院西安光学精密机械研究所
Recommended Citation
GB/T 7714
达争尚,高立民,陈永权,等. 取样劈板的取样率及取样均匀性干涉测量系统及方法. CN201810253356.4[P]. 2018-12-21.
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2018102533564.pdf(884KB)专利 暂不开放CC BY-NC-SAApplication Full Text
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