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Removal functions of different polishing heads worked in planet motion model
其他题名行星运动方式下不同形状磨头的去除函数
Yao, Yong-Sheng1; Ma, Zhen1; Xu, Liang1; Ding, Jiao-Teng1; Wang, Yong-Jie1; Shen, Le1; Jiang, Bo1,2
作者部门空间光学应用研究室
2017-10-01
发表期刊Guangxue Jingmi Gongcheng/Optics and Precision Engineering
ISSN1004924X
卷号25期号:10页码:2706-2713
产权排序1
摘要To obtain Gaussian-like removal function in optical manufacturing process, a convenient method to derive the removal functions of various complicated polishing heads by integrating the rotation removal function along the revolution trajectory was proposed based on the traditional planet polising theory. When the speed ratio was greater than 10,the removal function curve of a solid disk by the proposed method was very close to the result by the traditional method, which verifies the correctness of the proposed method. The proposed method was used to derive polishing removal functions of different polishing heads. By computer simulation, it shows that type II petal polishing head gets a better removal function curve when the eccentricity ratio is 0.4.Finally, the type II petal polishing head was polished, and the results indicate that when the eccentricity ratio was 0.4 and the speed ratio is 10,the test and simulation results are consistent with each other and they are all close to the Gaussian curve. These test result verifies the correctness of the proposed method again. © 2017, Science Press. All right reserved.

DOI10.3788/OPE.20172510.2706
收录类别EI ; CSCD
语种中文
引用统计
文献类型期刊论文
条目标识符http://ir.opt.ac.cn/handle/181661/30835
专题空间光学应用研究室
作者单位1.Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an; 710119, China;
2.University of Chinese Academy of Sciences, Beijing; 100049, China
推荐引用方式
GB/T 7714
Yao, Yong-Sheng,Ma, Zhen,Xu, Liang,et al. Removal functions of different polishing heads worked in planet motion model[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2017,25(10):2706-2713.
APA Yao, Yong-Sheng.,Ma, Zhen.,Xu, Liang.,Ding, Jiao-Teng.,Wang, Yong-Jie.,...&Jiang, Bo.(2017).Removal functions of different polishing heads worked in planet motion model.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,25(10),2706-2713.
MLA Yao, Yong-Sheng,et al."Removal functions of different polishing heads worked in planet motion model".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 25.10(2017):2706-2713.
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