| Removal functions of different polishing heads worked in planet motion model | |
| 其他题名 | 行星运动方式下不同形状磨头的去除函数 |
Yao, Yong-Sheng1; Ma, Zhen1 ; Xu, Liang1; Ding, Jiao-Teng1; Wang, Yong-Jie1; Shen, Le1; Jiang, Bo1,2
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| 作者部门 | 空间光学应用研究室 |
| 2017-10-01 | |
| 发表期刊 | Guangxue Jingmi Gongcheng/Optics and Precision Engineering
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| ISSN | 1004924X |
| 卷号 | 25期号:10页码:2706-2713 |
| 产权排序 | 1 |
| 摘要 | To obtain Gaussian-like removal function in optical manufacturing process, a convenient method to derive the removal functions of various complicated polishing heads by integrating the rotation removal function along the revolution trajectory was proposed based on the traditional planet polising theory. When the speed ratio was greater than 10,the removal function curve of a solid disk by the proposed method was very close to the result by the traditional method, which verifies the correctness of the proposed method. The proposed method was used to derive polishing removal functions of different polishing heads. By computer simulation, it shows that type II petal polishing head gets a better removal function curve when the eccentricity ratio is 0.4.Finally, the type II petal polishing head was polished, and the results indicate that when the eccentricity ratio was 0.4 and the speed ratio is 10,the test and simulation results are consistent with each other and they are all close to the Gaussian curve. These test result verifies the correctness of the proposed method again. © 2017, Science Press. All right reserved. |
| DOI | 10.3788/OPE.20172510.2706 |
| 收录类别 | EI ; CSCD |
| 语种 | 中文 |
| 引用统计 | |
| 文献类型 | 期刊论文 |
| 条目标识符 | http://ir.opt.ac.cn/handle/181661/30835 |
| 专题 | 空间光学技术研究室 |
| 作者单位 | 1.Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an; 710119, China; 2.University of Chinese Academy of Sciences, Beijing; 100049, China |
| 推荐引用方式 GB/T 7714 | Yao, Yong-Sheng,Ma, Zhen,Xu, Liang,et al. Removal functions of different polishing heads worked in planet motion model[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2017,25(10):2706-2713. |
| APA | Yao, Yong-Sheng.,Ma, Zhen.,Xu, Liang.,Ding, Jiao-Teng.,Wang, Yong-Jie.,...&Jiang, Bo.(2017).Removal functions of different polishing heads worked in planet motion model.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,25(10),2706-2713. |
| MLA | Yao, Yong-Sheng,et al."Removal functions of different polishing heads worked in planet motion model".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 25.10(2017):2706-2713. |
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| 文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
| Removal functions of（577KB） | 期刊论文 | 出版稿 | 限制开放 | CC BY-NC-SA | 请求全文 | |
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