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Microhole Drilling in TiC Ceramic with a Femtosecond Pulsed Laser
Zhang, J. Z.1; Liu, Y. S.2; Wang, Y. Q.1; Zhang, Y.1; Yang, X. J.3
作者部门光子制造中心
2018
发表期刊LASERS IN ENGINEERING
ISSN0898-1507;1029-029X
卷号41期号:43196页码:359-371
产权排序3
摘要

A femtosecond (fs) pulsed laser was employed to drill microholes in TiC ceramic. The Morphologies of microholes drilled at different assisted gas pressures and laser feeding speeds were investigated. Chemical compositions and chemical bonds of laser treated debris and untreated specimen were analysed. The mechanism of interaction between the femtosecond laser and the TiC ceramic was discussed. The results indicated that the assisted gas pressure had a greater effect on the morphologies of microholes, compared with the feeding speed. The entrance diameter of microholes was smaller than the exit diameter. The entrance roundness was more perfect than the exit roundness, and the entrance roundness decreased slightly with increasing gas pressure and feeding speed. Higher feeding speed was unfavourable to the morphologies of microholes. Ti, C and O were detected in laser treated debris. X-ray photoelectron spectroscopy (XPS) investigation showed that the C-Ti bond was broken and Ti2O3 and TiO2 were formed during drilling.

关键词Femtosecond Pulsed Laser Tic Ceramic Microholes Assisted Gas Pressure Feed Speed Morphology Machining Mechanism
收录类别SCI ; EI
语种英语
WOS记录号WOS:000445529800010
出版者OLD CITY PUBLISHING INC
EI入藏号20184005883275
引用统计
文献类型期刊论文
条目标识符http://ir.opt.ac.cn/handle/181661/30648
专题光子制造中心
通讯作者Zhang, Y.
作者单位1.Xian Univ Architecture & Technol, Coll Mat & Mineral Resources, Xian 710055, Shaanxi, Peoples R China
2.Northwestern Polytech Univ, State Key Lab Solidificat Proc, Xian 710072, Shaanxi, Peoples R China
3.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 710119, Shaanxi, Peoples R China
推荐引用方式
GB/T 7714
Zhang, J. Z.,Liu, Y. S.,Wang, Y. Q.,et al. Microhole Drilling in TiC Ceramic with a Femtosecond Pulsed Laser[J]. LASERS IN ENGINEERING,2018,41(43196):359-371.
APA Zhang, J. Z.,Liu, Y. S.,Wang, Y. Q.,Zhang, Y.,&Yang, X. J..(2018).Microhole Drilling in TiC Ceramic with a Femtosecond Pulsed Laser.LASERS IN ENGINEERING,41(43196),359-371.
MLA Zhang, J. Z.,et al."Microhole Drilling in TiC Ceramic with a Femtosecond Pulsed Laser".LASERS IN ENGINEERING 41.43196(2018):359-371.
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