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Microhole Drilling in TiC Ceramic with a Femtosecond Pulsed Laser
Zhang, J. Z.1; Liu, Y. S.2; Wang, Y. Q.1; Zhang, Y.1; Yang, X. J.3
Department光子制造中心
2018
Source PublicationLASERS IN ENGINEERING
ISSN0898-1507;1029-029X
Volume41Issue:43196Pages:359-371
Contribution Rank3
Abstract

A femtosecond (fs) pulsed laser was employed to drill microholes in TiC ceramic. The Morphologies of microholes drilled at different assisted gas pressures and laser feeding speeds were investigated. Chemical compositions and chemical bonds of laser treated debris and untreated specimen were analysed. The mechanism of interaction between the femtosecond laser and the TiC ceramic was discussed. The results indicated that the assisted gas pressure had a greater effect on the morphologies of microholes, compared with the feeding speed. The entrance diameter of microholes was smaller than the exit diameter. The entrance roundness was more perfect than the exit roundness, and the entrance roundness decreased slightly with increasing gas pressure and feeding speed. Higher feeding speed was unfavourable to the morphologies of microholes. Ti, C and O were detected in laser treated debris. X-ray photoelectron spectroscopy (XPS) investigation showed that the C-Ti bond was broken and Ti2O3 and TiO2 were formed during drilling.

KeywordFemtosecond Pulsed Laser Tic Ceramic Microholes Assisted Gas Pressure Feed Speed Morphology Machining Mechanism
Indexed BySCI ; EI
Language英语
WOS IDWOS:000445529800010
PublisherOLD CITY PUBLISHING INC
EI Accession Number20184005883275
Citation statistics
Document Type期刊论文
Identifierhttp://ir.opt.ac.cn/handle/181661/30648
Collection光子制造中心
Corresponding AuthorZhang, Y.
Affiliation1.Xian Univ Architecture & Technol, Coll Mat & Mineral Resources, Xian 710055, Shaanxi, Peoples R China
2.Northwestern Polytech Univ, State Key Lab Solidificat Proc, Xian 710072, Shaanxi, Peoples R China
3.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 710119, Shaanxi, Peoples R China
Recommended Citation
GB/T 7714
Zhang, J. Z.,Liu, Y. S.,Wang, Y. Q.,et al. Microhole Drilling in TiC Ceramic with a Femtosecond Pulsed Laser[J]. LASERS IN ENGINEERING,2018,41(43196):359-371.
APA Zhang, J. Z.,Liu, Y. S.,Wang, Y. Q.,Zhang, Y.,&Yang, X. J..(2018).Microhole Drilling in TiC Ceramic with a Femtosecond Pulsed Laser.LASERS IN ENGINEERING,41(43196),359-371.
MLA Zhang, J. Z.,et al."Microhole Drilling in TiC Ceramic with a Femtosecond Pulsed Laser".LASERS IN ENGINEERING 41.43196(2018):359-371.
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