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Rotationally asymmetric figure measurement of optical flat using rotational shear phase measuring deflectometry
Kewei, E.1; Li, Dahai2; Zhao, Jianke1; Xue, Xun3; Li, Jing1; Li, Kun1; Liu, Shangkuo1; Wang, Zhengfeng1; Zhou, Yan1
2018
会议名称Global Intelligence Industry Conference, GIIC 2018
会议录名称Global Intelligence Industry Conference, GIIC 2018
卷号10835
会议日期2018-05-22
会议地点Beijing, China
出版者SPIE
产权排序1
摘要Absolute measurement with Phase Measuring Deflectometry (PMD) is gaining importance in industry, but the accuracy of deflectometry metrology is strongly influenced by the level of calibration. In order to improve the accuracy of the PMD to a level where it competes with interferometry, a reference calibration process is commonly carried out to carefully calibrate the systematic errors. The systematic errors obtained by measuring a high quality reference surface can be subtracted from the measurement of a test surface to get its actual surface, however, it could introduce the surface error of reference into the measurement. To alleviate this problem, this paper introduces a technique named "rotational shear phase measuring deflectometry", this technique have the ability of removing the rotationally asymmetric systematic errors from the test surface without using a reference surface. The validity of this technique has been demonstrated by simulation and our experimental results. © 2018 SPIE.
作者部门检测技术研究中心
DOI10.1117/12.2504666
收录类别EI
ISBN号9781510622999
语种英语
ISSN号0277786X;1996756X
EI入藏号20183805842556
引用统计
文献类型会议论文
条目标识符http://ir.opt.ac.cn/handle/181661/30630
专题检测技术研究中心
作者单位1.Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an; 710119, China;
2.College of Electronics and Information Engineering, Sichuan University, Chengdu; 610065, China;
3.School of Science, Xi'An Jiaotong University, Xi'an; 710049, China
推荐引用方式
GB/T 7714
Kewei, E.,Li, Dahai,Zhao, Jianke,et al. Rotationally asymmetric figure measurement of optical flat using rotational shear phase measuring deflectometry[C]:SPIE,2018.
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