Rotationally asymmetric figure measurement of optical flat using rotational shear phase measuring deflectometry | |
Kewei, E.1; Li, Dahai2; Zhao, Jianke1; Xue, Xun3; Li, Jing1; Li, Kun1; Liu, Shangkuo1; Wang, Zhengfeng1; Zhou, Yan1 | |
2018 | |
会议名称 | Global Intelligence Industry Conference, GIIC 2018 |
会议录名称 | Global Intelligence Industry Conference, GIIC 2018 |
卷号 | 10835 |
会议日期 | 2018-05-22 |
会议地点 | Beijing, China |
出版者 | SPIE |
产权排序 | 1 |
摘要 | Absolute measurement with Phase Measuring Deflectometry (PMD) is gaining importance in industry, but the accuracy of deflectometry metrology is strongly influenced by the level of calibration. In order to improve the accuracy of the PMD to a level where it competes with interferometry, a reference calibration process is commonly carried out to carefully calibrate the systematic errors. The systematic errors obtained by measuring a high quality reference surface can be subtracted from the measurement of a test surface to get its actual surface, however, it could introduce the surface error of reference into the measurement. To alleviate this problem, this paper introduces a technique named "rotational shear phase measuring deflectometry", this technique have the ability of removing the rotationally asymmetric systematic errors from the test surface without using a reference surface. The validity of this technique has been demonstrated by simulation and our experimental results. © 2018 SPIE. |
关键词 | Metrology Surface Measurement Figure Rotational Shear |
作者部门 | 检测技术研究中心 |
DOI | 10.1117/12.2504666 |
收录类别 | EI ; CPCI |
ISBN号 | 9781510622999 |
语种 | 英语 |
ISSN号 | 0277786X;1996756X |
WOS记录号 | WOS:000452819500015 |
EI入藏号 | 20183805842556 |
引用统计 | |
文献类型 | 会议论文 |
条目标识符 | http://ir.opt.ac.cn/handle/181661/30630 |
专题 | 检测技术研究中心 |
作者单位 | 1.Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an; 710119, China; 2.College of Electronics and Information Engineering, Sichuan University, Chengdu; 610065, China; 3.School of Science, Xi'An Jiaotong University, Xi'an; 710049, China |
推荐引用方式 GB/T 7714 | Kewei, E.,Li, Dahai,Zhao, Jianke,et al. Rotationally asymmetric figure measurement of optical flat using rotational shear phase measuring deflectometry[C]:SPIE,2018. |
条目包含的文件 | ||||||
文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
Rotationally asymmet(518KB) | 会议论文 | 限制开放 | CC BY-NC-SA | 请求全文 |
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