OPT OpenIR  > 检测技术研究中心
Rotationally asymmetric figure measurement of optical flat using rotational shear phase measuring deflectometry
Kewei, E.1; Li, Dahai2; Zhao, Jianke1; Xue, Xun3; Li, Jing1; Li, Kun1; Liu, Shangkuo1; Wang, Zhengfeng1; Zhou, Yan1
2018
Conference NameGlobal Intelligence Industry Conference, GIIC 2018
Source PublicationGlobal Intelligence Industry Conference, GIIC 2018
Volume10835
Conference Date2018-05-22
Conference PlaceBeijing, China
PublisherSPIE
Contribution Rank1
Abstract

Absolute measurement with Phase Measuring Deflectometry (PMD) is gaining importance in industry, but the accuracy of deflectometry metrology is strongly influenced by the level of calibration. In order to improve the accuracy of the PMD to a level where it competes with interferometry, a reference calibration process is commonly carried out to carefully calibrate the systematic errors. The systematic errors obtained by measuring a high quality reference surface can be subtracted from the measurement of a test surface to get its actual surface, however, it could introduce the surface error of reference into the measurement. To alleviate this problem, this paper introduces a technique named "rotational shear phase measuring deflectometry", this technique have the ability of removing the rotationally asymmetric systematic errors from the test surface without using a reference surface. The validity of this technique has been demonstrated by simulation and our experimental results. © 2018 SPIE.

KeywordMetrology Surface Measurement Figure Rotational Shear
Department检测技术研究中心
DOI10.1117/12.2504666
Indexed ByEI ; CPCI
ISBN9781510622999
Language英语
ISSN0277786X;1996756X
WOS IDWOS:000452819500015
EI Accession Number20183805842556
Citation statistics
Document Type会议论文
Identifierhttp://ir.opt.ac.cn/handle/181661/30630
Collection检测技术研究中心
Affiliation1.Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an; 710119, China;
2.College of Electronics and Information Engineering, Sichuan University, Chengdu; 610065, China;
3.School of Science, Xi'An Jiaotong University, Xi'an; 710049, China
Recommended Citation
GB/T 7714
Kewei, E.,Li, Dahai,Zhao, Jianke,et al. Rotationally asymmetric figure measurement of optical flat using rotational shear phase measuring deflectometry[C]:SPIE,2018.
Files in This Item:
File Name/Size DocType Version Access License
Rotationally asymmet(518KB)会议论文 开放获取CC BY-NC-SAApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Kewei, E.]'s Articles
[Li, Dahai]'s Articles
[Zhao, Jianke]'s Articles
Baidu academic
Similar articles in Baidu academic
[Kewei, E.]'s Articles
[Li, Dahai]'s Articles
[Zhao, Jianke]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Kewei, E.]'s Articles
[Li, Dahai]'s Articles
[Zhao, Jianke]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.