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Two-dimensional electron gas characteristics of InP-based high electron mobility transistor terahertz detector
Li, Jin-Lun1,2; Cui, Shao-Hui1; Xu, Jian-Xing2,4; Cui, Xiao-Ran2,5; Guo, Chun-Yan2,6; Ma, Ben2,3; Ni, Hai-Qiao2,3; Niu, Zhi-Chuan2,3; Ni, HQ (reprint author), Chinese Acad Sci, Inst Semicond, State Key Lab Superlattices, Beijing 100083, Peoples R China.
作者部门精密物理量测量实验室
2018-04-01
发表期刊CHINESE PHYSICS B
ISSN1674-1056
卷号27期号:4
产权排序6
摘要

The samples of InxGa1-xAs/In0.52Al0.48As two-dimensional electron gas (2DEG) are grown by molecular beam epitaxy (MBE). In the sample preparation process, the In content and spacer layer thickness are changed and two kinds of methods, i.e., contrast body doping and delta-doping are used. The samples are analyzed by the Hall measurements at 300 K and 77 K. The InxGa1-xAs/In0.52Al0.48As 2DEG channel structures with mobilities as high as 10289 cm(2)/V.s (300 K) and 42040 cm(2)/V.s (77 K) are obtained, and the values of carrier concentration (N-c) are 3.465 x 10(12)/cm(2) and 2.502 x 10(12)/cm(2), respectively. The THz response rates of InP-based high electron mobility transistor (HEMT) structures with different gate lengths at 300 K and 77 K temperatures are calculated based on the shallow water wave instability theory. The results provide a reference for the research and preparation of InP-based HEMT THz detectors.

文章类型Article
关键词Thz Detector High Electron Mobility Transistor Two-dimensional Electron Gas Inp
学科领域Physics, Multidisciplinary
WOS标题词Science & Technology ; Physical Sciences
DOI10.1088/1674-1056/27/4/047101
收录类别SCI ; EI
关键词[WOS]FIELD-EFFECT TRANSISTOR ; DEVICES ; FLUID
语种英语
WOS研究方向Physics
项目资助者Foundation for Scientific Instrument and Equipment Development, Chinese Academy of Sciences(YJKYYQ20170032) ; National Natural Science Foundation of China(61435012)
WOS类目Physics, Multidisciplinary
WOS记录号WOS:000430619200001
EI入藏号20181905174638
引用统计
被引频次:4[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.opt.ac.cn/handle/181661/30080
专题条纹相机工程中心
通讯作者Ni, HQ (reprint author), Chinese Acad Sci, Inst Semicond, State Key Lab Superlattices, Beijing 100083, Peoples R China.
作者单位1.Army Engn Univ, Dept Missile Engn, Shijiazhuang Campus, Shijiazhuang 050003, Hebei, Peoples R China
2.Chinese Acad Sci, Inst Semicond, State Key Lab Superlattices, Beijing 100083, Peoples R China
3.Univ Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R China
4.China Acad Engn Phys, Microsyst & Terahertz Res Ctr, Chengdu 610200, Sichuan, Peoples R China
5.Xidian Univ, Wide Bandgap Semicond Technol Disciplines State L, Xian 710071, Shaanxi, Peoples R China
6.Chinese Acad Sci, Xian Inst Opt & Precis Mech, Key Lab Ultrafast Photoelect Diagnost Technol, Xian 710119, Shaanxi, Peoples R China
推荐引用方式
GB/T 7714
Li, Jin-Lun,Cui, Shao-Hui,Xu, Jian-Xing,et al. Two-dimensional electron gas characteristics of InP-based high electron mobility transistor terahertz detector[J]. CHINESE PHYSICS B,2018,27(4).
APA Li, Jin-Lun.,Cui, Shao-Hui.,Xu, Jian-Xing.,Cui, Xiao-Ran.,Guo, Chun-Yan.,...&Ni, HQ .(2018).Two-dimensional electron gas characteristics of InP-based high electron mobility transistor terahertz detector.CHINESE PHYSICS B,27(4).
MLA Li, Jin-Lun,et al."Two-dimensional electron gas characteristics of InP-based high electron mobility transistor terahertz detector".CHINESE PHYSICS B 27.4(2018).
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