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Edge effect modeling of small tool polishing in planetary movement
Li, Qi-Xin1,2; Ma, Zhen1; Jiang, Bo1,2; Yao, Yong-Sheng1; Li, Qi-Xin (liqixin16@mails.ucas.ac.cn)
2018
Conference NameYoung Scientists Forum 2017
Source PublicationYoung Scientists Forum 2017
Volume10710
Conference Date2017-11-24
Conference PlaceShanghai, China
PublisherSPIE
Contribution Rank1
Abstract

As one of the most challenging problems in Computer Controlled Optical Surfacing (CCOS), the edge effect greatly affects the polishing accuracy and efficiency. CCOS rely on stable tool influence function (TIF), however, at the edge of the mirror surface,with the grinding head out of the mirror,the contact area and pressure distribution changes, which resulting in a non-linear change of TIF, and leads to tilting or sagging at the edge of the mirror. In order reduce the adverse effects and improve the polishing accuracy and efficiency. In this paper, we used the finite element simulation to analyze the pressure distribution at the mirror edge and combined with the improved traditional method to establish a new model. The new method fully considered the non-uniformity of pressure distribution. After modeling the TIFs in different locations, the description and prediction of the edge effects are realized, which has a positive significance on the control and suppression of edge effects. © 2018 SPIE.

Department空间光学应用研究室
DOI10.1117/12.2317560
Indexed ByEI ; CPCI
ISBN9781510619777
Language英语
ISSN0277786X
WOS IDWOS:000451888100103
EI Accession Number20181505006946
Citation statistics
Document Type会议论文
Identifierhttp://ir.opt.ac.cn/handle/181661/30039
Collection空间光学应用研究室
Corresponding AuthorLi, Qi-Xin (liqixin16@mails.ucas.ac.cn)
Affiliation1.Xi'An Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, No. 17 Information Avenue, Chang'an District, Xi'an; 710119, China
2.University of Chinese Academy of Sciences, No. 19 Yuquan Road, Shijingshan District, Beijing; 100049, China
Recommended Citation
GB/T 7714
Li, Qi-Xin,Ma, Zhen,Jiang, Bo,et al. Edge effect modeling of small tool polishing in planetary movement[C]:SPIE,2018.
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