OPT OpenIR  > 条纹相机工程中心
InGaAs-MSM photodetector with low dark current
Alternative Title低暗电流InGaAs-MSM光电探测器
Yan, Xin; Wang, Tao; Yin, Fei; Ni, Hai-Qiao; Niu, Zhi-Chuan; Xin, Li-Wei; Tian, Jin-Shou
Source PublicationGuangzi Xuebao/Acta Photonica Sinica
AbstractMSM (Mental-Semiconductor-Mental) photodetector has been widely used for its low capacitance and high bandwidth. For example, it can be used for space communication, remote sense and so on. But the development of MSM devices is still hindered by the dark current. In this paper, the 100×100 μm2 InGaAs-MSM photodetector is successfully fabricated. The dark current density is reduced to 0.6 pA/μm2 (5 V) by designing InAlGaAs/InGaAs short period superlattices and InAlAs Schottky barrier enhancement and this improves the SNR. Parameters of the device are characterized as follows: the 3dB bandwidth is 6.8 GHz, the rise time is 58.8 ps, the responsibility is 0.55 A/W at 1550 nm and the external quantum efficiency of the absorption region is 88%. Inhibition mechanisms of the short period superlattices and Schottky barrier enhancement are analyzed. ©, 2015, Chinese Optical Society. All right reserved.
Indexed ByEI
Document Type期刊论文
Recommended Citation
GB/T 7714
Yan, Xin,Wang, Tao,Yin, Fei,et al. InGaAs-MSM photodetector with low dark current[J]. Guangzi Xuebao/Acta Photonica Sinica,2015,44(6).
APA Yan, Xin.,Wang, Tao.,Yin, Fei.,Ni, Hai-Qiao.,Niu, Zhi-Chuan.,...&Tian, Jin-Shou.(2015).InGaAs-MSM photodetector with low dark current.Guangzi Xuebao/Acta Photonica Sinica,44(6).
MLA Yan, Xin,et al."InGaAs-MSM photodetector with low dark current".Guangzi Xuebao/Acta Photonica Sinica 44.6(2015).
Files in This Item:
File Name/Size DocType Version Access License
InGaAs-MSM photodete(1263KB)期刊论文作者接受稿开放获取CC BY-NC-SAView Application Full Text
Related Services
Recommend this item
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Yan, Xin]'s Articles
[Wang, Tao]'s Articles
[Yin, Fei]'s Articles
Baidu academic
Similar articles in Baidu academic
[Yan, Xin]'s Articles
[Wang, Tao]'s Articles
[Yin, Fei]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Yan, Xin]'s Articles
[Wang, Tao]'s Articles
[Yin, Fei]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: InGaAs-MSM photodetector with low dark current.pdf
Format: Adobe PDF
This file does not support browsing at this time
All comments (0)
No comment.

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.